1-100um Alumina or Silicon Carbide Porous Ceramic

Innovacera supply the Alumina Porous ceramic disc for Vacuum Chuck which is mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation, and so on. Main Application field: — New and refurbished alumina porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc dicing saws and grinders. — 6″, 8,” 12″ are regular sizes, And pore size include 15 um, 30 um, 50 um, 100 um. Materials are alumina (Color: white, light brown, dark brown, blue-gray) — Custom size (like square, oval shape, or irregular shapes) is available for us. Characteristics include: High flatness and parallelism Compact and uniform microstructure with high strength Good permeability and uniform adsorption affinity Long life time Dressing easily.

Innovacera uses its deep ceramics expertise and process capabilities to manufacture ceramics with precisely controlled porosity. Porous ceramics are often used for chemical filtration and fluid separation. The range of Innovacera porous ceramics is made from aluminum oxide and silicon carbide. The strong, uniform porous ceramic has 40-50% open porosity with a tortuous pore structure and is available in pore sizes ranging from 1 to 100 microns. Three Main Application of Porous Ceramic: Vacuum Chuck, like scribing machine vacuum chuck, silicon wafer vacuum chuck. Adsorption platform. Suspension platform. Especially, they are widely used for the semiconductor industry, like LED wafer processing. The micro-porous ceramic working disk is a special tool for adsorption and bearing in various semiconductor wafer production processes, and is applied to processes such as thinning, dicing, cleaning, and handling.

Porous ceramic tubes are composed by the distributed evenly open pores which is interconnected by shape like arch , when the fluid through these pores,the suspended matter, colloidal particles, organic molecules are trapped, adsorbed inside the micropores,then track to achieve the purification and filtration homogenizing effect. The porous ceramic has the advatage with high strength, wear resistance, high temperature, corrosion, pollution, porosity distribution, long service life and easy to regenerate, which is particularly suitable for a variety of gas, liquid filtration and fluidized process. * Good electrical insulation * High dimensional tolerances * Excellent corrosion resistance * Very high working temperatures * Excellent thermal shock properties

Innovacera supply the Porous ceramic plate/disc for Vacuum Chuck, which is mainly used to support and chuck the semiconductor wafer when grinding and dicing. It is applied in the process of thinning, dicing, clearance, transportation, and so on. Only one size in stock (Dia200*T3mm, 15um), custom size is available. Main Application field: — New and refurbished, porous ceramic chucks for Disco, ADT, K & S, Applied materials TSK, OKAMOTO, Micro Automation, Load Point, etc. dicing saws and grinders. — 6″, 8,” 12″ are regular sizes, And pore size include 15um, 30um, 50um, 100um. Materials are alumina (Color: white, light brown, dark brown, blue-gray) — Custom size (like square, oval shape, or irregular shapes) is available for us. Characteristics include: High flatness and parallelism Compact and uniform microstructure with high strength Good permeability and uniform adsorption affinity Long lifetime Dressing easily.