Nano Linear Nt･･･h

IKO Nano Linear NT is a moving magnet type linear motor table with a magnet and optical linear encoder scale in the steel moving table part, and a stator coil and optical linear encoder head in the steel bed. For the table guiding parts, an IKO Linear Way, wellestablished in the area of miniature linear motion rolling guides, is used in combination with a linear motor and highresolution linear encoder to realize highly accurate positioning. Thanks to the adoption of highperformance neodymium magnet, large thrust force can be acquired and therefore highspeed and highly responsive positioning is possible, despite its very small body. In addition, high cleanliness is realized as the mechanical contact part is only the linear motion rolling guide thanks to adoption of a landmark driving method without cables. Nano Linear NT is an optimal compact positioning mechanism for semiconductor and LCD manufacturing machines, as well as testing and inspection equipment

IKO Nano Linear NT is a compact linear motor table with excellent functionalities, such as a magnet and optical linear encoder scale in the steel moving table part, and a stator coil and an optical linear encoder head in the steel bed. For the table guiding parts, the adoption of CLube Linear Way ML, which realizes long term maintenance free use, helps reduce the maintenance work. Despite its very small body, the rotator exerts a maximum thrust of 36N by adopting a highperformance neodymium magnet, enabling highspeed, highly responsive positioning. Highcleanliness can be realized as the mechanical contact part is only Linear Way. Nano Linear NT is an optimal compact positioning mechanism for semiconductor and LCD manufacturing machines, as well as testing and inspection equipment and assemblers which require a clean environment.

Precision Positioning Table LB is a highspeed movementenabled, long stroke positioning table that adopts a highly durable and hightensile timing belt containing steel cord incorporated into the feeding mechanism of the slide table, and uses a high torque 5phase stepper motor as the driving motor. The slide table and bed are made of lightweight highstrength aluminum alloy. Two sets of IKO Linear Way are incorporated into the linear motion rolling guide in parallel, realizing stable and high running performance. Precision Positioning Table LB is ideal as a positioning mechanism, for assemblers, conveying machines or pallet changers that work at high speed.

Using IKO CLube Linear Way L for the linear motion rolling guide and IKO Crossed Roller Bearings in the rotation guiding parts, while adopting direct drive method in the drive section, IKO Alignment Stage SA···DE is a compact, lowprofile alignment stage which achieves XYθ motion.Alignment Stage SA···DE achieves highly accurate positioning without backlash by combining a highresolution linear scale and full closed loop control. An ideal positioning mechanism for alignment processing using image processing, such as in semiconductor/liquid crystal manufacturing equipment, or for measuring instruments or testing and inspection equipment requiring clean environments.