Compatible Vacuum Gauges and Controllers
PEG100
Description
The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols. This Penning Gauge PEG100 series is direct replacement for Penning Transmitters of the PTR 225 / PTR 225 S / PTR 237 / PTR 225 PB / PTR 237 D series: Part-No Typ Part-No Typ 351-000 PEG100 DN 25 ISO-KF = 157 34 PTR 225 DN 25 KF 351-001 PEG100-S DN 25 ISO-KF, SP = 164 34 PTR225 S DN 25 KF, SP 351-002 PEG100 DN 40 CF-R = 157 36 PTR 237 DN 40 CF-R 351-005 PEG100-P DN 25 ISO-KF, PB = 896 41 PTR 225 PB DN 25 KF, PB 351-004 PEG100-D DN 40 CF-R, DevNet = 896 42 PTR 237 D DN 40 CF-R, DevNet 351-490 PEG100 Spare cathode plates (5 pcs) = 16291 PTR...
Product characteristics
- Measurement range
- 1 x 10 -9 to 1 x 10 -2
- 10 -8 to 10 -4 mbar
- ±30
- Pressure, max. (absolute)
- 10
- Operation (ambient)
- +10 to +50
- Storage
- -20 to +75
- Bakeout without electronics
- 350
- Bakeout with electronics, at flange
- 70
- Voltage
- 14.5 to 36
- Output signal
- 0 to 10.6
- Measurement range
- 0.66 to 10
- Relation voltage / pressure
- 1.333
- Connector
- FCC 68, female, 8 pin (shielded)
- Cable length, max (analog)
- 100 (330)
- Materials exposed to vacuum
- Stainless steel, CrNi, AI 2O 3, NiFe, Mo, Cu, Ni, Ti
- Internal volume
- 21 (1.28)
- Weight, approx.
- 500
- Protection type
- IP40
- Device type
- generic
- Explicit peer to peer messaging
- no
- I / O peer to peer messaging
- no
- Configuration consistency value
- no
- Faulted node recovery
- no
- Baud rates
- 125 / 250 / 500
- Master / Scanner
- no
- I / 0 slave messaging
- yes
- I / 0 slave messaging
- yes
- I / 0 slave messaging
- yes
- I / 0 slave messaging
- yes
- Supply for DeviceNet™
- 11 to 25
- Connector for DeviceNet™
- Phoenix Combicon, 5 pin
- Supported baud rates (auto detection)
- 9.6 / 19.2 / 93.75 / 187.5 / 500 / 1500
- Sync-Mode and Freeze-Mode
- Yes
- Connector for Profibus
- D-sub, 9 pin
Documents
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