Plasma-Surface-Treatment-System | Femto

Low-pressure Plasma system, Plasma-Surface-Treatment-System, Plasma Cleaner
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Description

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Femto low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of 2 to 3 litres of this plasma system offers enough space to serve laboratory and small series production. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ... Etching of PTFE, photoresist, oxide layers, ... Super-hydrophobic and -hydrophilic coatings

  • Surface treatment - machinery and equipment
  • surface treatment
  • Low-pressure plasma system
  • Plasma cleaner

Product characteristics

Dimensions (Table Top)
310 - 560 mm x 211 - 860 mm x 420 - 600 mm (WxHxD)
Dimensions (Stand Alone)
600 mm x 1700 mm x 800 mm (WxHxD)
Vacuum Chamber material
Stainless steel, Aluminium, Silica glass (UHP), Borosilicate (HP)
Vacuum Chamber dimensions
Ø 95/100 mm, D 280/278 mm, 103-110 mm x 103-120 mm x 285-300 mm(WxHxD)
Vacuum Chamber volume
approx. 2 - 3 litres
Vacuum Chamber closure
Lid, hinged door
Gas supply
Needle valves or mass flow controllers (MFCs)
Pressure measurement
Pirani, Capacity pressure gauge
Generator
40 kHz; 100 kHz; 13,56 MHz; 2,45 GHz
Electrodes
According to customer requirements
Controles
Semiautomatic, Rotary switch, Basic PC (Win.CE), Full PC (Win.10 IoT)
Power supply
230 V / 400 V / 50 - 60 Hz
Vacuum pump
Capacity: 3 m³/h

Domain icon Manufacturer/ Producer

72224 Ebhausen - Germany

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