Plasma-Surface-Treatment-System | Tetra 100

Low-pressure Plasma system, Plasma-Surface-Treatment-System, Plasma Cleaner
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Description

Plasma systems from Diener electronic have long since established themselves in a wide range of industrial sectors. With the Tetra 100 low-pressure plasma system, you can rely on modern and future-proof cold plasma technology in a vacuum. The chamber volume of approx. 100 litres of this plasma system offers enough space to serve series production / automation. Low pressure plasma treatment is a proven technique for controlled ultra-fine cleaning, adhesion enhancement (activation and etching) and coating of thin films on substrate surfaces. Plasma is generated by applying high-frequency voltage in the vacuum chamber. In the process, the process gas introduced there is ionised. Fields of application: VOC-free cleaning of organic residues Activation before painting, gluing, potting, ... Etching of PTFE, photoresist, oxide layers, ... Super-hydrophobic and -hydrophilic coatings

  • Surface treatment - machinery and equipment
  • surface treatment
  • Low-pressure plasma system
  • Plasma cleaner

Product characteristics

Dimensions (Stand Alone - 19" Rack)
600 mm x 1700 - 2100 mm x 800 mm (WxHxD)
Vacuum Chamber material
Stainless steel, Aluminium
Vacuum Chamber dimensions
approx. 400 mm x 400 mm x 625 mm (WxHxD) - Dmax 3 m
Vacuum Chamber volume
approx. 100 litres
Vacuum Chamber closure
Hinged door, automatic door
Gas supply
Mass flow controllers (MFCs)
Pressure measurement
Pirani, Capacity pressure gauge
Generator
80 kHz; 13,56 MHz; 2,45 GHz
Electrodes
According to customer requirements
Controles
Basic PC (Win.CE), Full PC (Win.10 IoT)
Power supply
400 V / 50 - 60 Hz
Vacuum pump
According to customer requirements

Domain icon Manufacturer/ Producer

72224 Ebhausen - Germany

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