Replacement Parts

Spare parts include for example chambers, filaments, arc slits, holders and many other parts. The pare parts are made of graphite, molybdenum, tungsten and alloys. They are extremely durable and long lasting and therefore save money and maintenance time. 100 or more Plansee components are at work in every beam path. They ensure that the ions are generated efficiently and guided precisely and free from impurities along the beam path to the wafer. For customers in the semiconductor industry, Plansee spare parts are increasingly becoming more than just spares. Taking the equipment manufacturer's original spare parts as starting point, Plansee optimizes the geometries and material compositions. The benefits to you: — Simplified component installation and removal — Longer service lives — Lower cleaning costs — Reduced maintenance work — Reduced downtimes

23 CM 1000 CC 6 PIECES IN THE PACK

Why temperature measurement? Information available regarding lifetime of the gearbox Lifetime extension of the gearbox and prevention of sudden gearbox failures Cost savings through prevention of unplanned machine stops Determination of oil temperature and oil condition Immediate reaction to thermic influences: timely maintenance measures (oil changes, change of the seals, replacement gearbox)

unipo® display replacement The following options are available for our own brand unipo® display replacement solutions from the UFD product range Purchase a reconditioned replacement part or new part Replace a reconditioned replacement part or new part Purchase product overhaul repair or cleaning & inspection services We will be happy to supply an onsite service incl. support over the phone, upon request. Our extensive replacement parts warehouse with more than 100,000 instantly accessible modules provides our customers with a fast supply of replacement parts ensuring the costs of machine downtimes are kept to a minimum. All of the repaired modules, exchange services, and new and replacement part deliveries of unipo® display replacement solutions come with a 24month warranty*.