Residual Gas Analyzers (RGA) and Mass Spectrometers
100 AMU CPM
Description
FAST, FIELD-READY PROCESS MONITORING SYSTEM Performance, Reliability, and Versatility INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch. Transpector CPM 3 provides proven return on investment to our partners through: 1 Ion source pressure reading @ low emission using total pressure lens 2 Total pressure accuracy @ low emission 3 Maximum ion source operating pressure @ low emission 4 2x10 -4 Torr in the ion source will produce about 1x10 -5 Torr in the quadrupole region 5 MDPP at the ion source with EM on and 1s dwell time 6 Mass 40 contribution onto 41 AMU 7 Zero blast...
Product characteristics
- Resolution
- 1 amu wide @ 10% peak height
- Total Pressure Range¹
- 5E-7 - 1E-3 Torr
- Total Pressure Accuracy²
- +/- 25% 1E-6 - 1E-3 Torr
- Maximum Ion Source Operating Pressure³
- 1E-3 Torr
- Nominal Operating Pressure⁴
- 2E-4 Torr
- System Operating Pressure
- 1E-8 Torr - 1.2 atm
- Sensitivity (Low Emission)
- > 4E-6 Amps/Torr
- Sensitivity (High Emission)
- > 2E-5 Amps/Torr
- Minimum Detectable Partial Pressure⁵
- 1E-13 Torr
- Maximum Data Rate
- 1.8 ms/point (555 points/sec)
- Abundance Sensitivity⁶
- < 5 ppm
- Zero Blast⁷
- < 2 ppm
- Detection Limit⁸
- < 1 ppm
- Linearity⁹
- +/- 20%
- Minimum Background Pressure
- 1E-8 Torr
- Maximum Sensor and Inlet Temperature
- 150
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