Residual Gas Analyzers (RGA) and Mass Spectrometers
MPS100F
Description
THE STANDARD IN GAS ANALYSIS Excellent Performance and Great Value for General Vacuum Applications As manufacturing technologies advance and quality standards change, the need to understand your process and maintain product quality is more important than ever. Transpector MPS can help you optimize your process by monitoring process conditions, detecting contaminants, and checking for leaks. Transpector MPS offers the robust performance of the Transpector brand of RGA at an excellent value for our customers. Transpector MPS is available in both 100 amu and 200 amu versions, which gives you the flexibility of performing a wide variety of functions including general leak detection, vacuum diagnostics, and hydrocarbon analysis. This versatility makes Transpector MPS the sensor of choice for vacuum furnace, heat treating, and vacuum coating applications. (1) at 10% of peak height (2) during an eight hour period, after a half hour warm up; in FC mode only (3) 256 millisecond dwell time
Product characteristics
- Sensor Length
- 14.3 cm
- Mass Range
- 100 amu
- Detector Type
- FC
- Sensitivity (FC)
- 3E-4 amps/Torr
- Sensitivity (EM)
- NA
- Min. Detectable Partial Pressure (3)
- 2.6E-12 Torr
- Max. Sensor Operating Temp. (FC)
- 200 °C
- Max. Sensor Operating Temp. (EM)
- NA
- Filament Type Option
- Dual Y2O3/Ir filaments
- Max. Data Rate per Point
- 3 ms
- Max. Operating Pressure
- 5E-4 Torr
- Max. Bakeout Temp.
- 300 °C
- Power Input
- 20-30 VDC
Similar products from INFICON GMBH
INFICON GMBH
Germany
Process Characterization Software For The Transpector Gas Analysis System With one-click access to the two most popular RGA functions: monitor and leak check modes, FabGuard Explorer provides you with easy to interpret data showing the most frequently monitored gases (hydrogen, water vapor, nitrogen, oxygen, argon, etc.) in a convenient trend display. FabGuard Explorer is Windows® 8 ready, providing comprehensive RGA software with no concerns about operating system compatibility. The single-sensor version of FabGuard Explorer is a cost-effective solution to operating one Transpector ® RGA. With the software’s multi-sensor version, you can control multiple, different types of Transpector RGAs from a single computer. FabGuard Explorer allows for control of both Transpector MPH and Transpector 2 RGAs from the same software. For connecting multiple Transpector MPH sensors, INFICON offers routers and network switches, while the TCA485 Transpector Communications Adapter is used for...
INFICON GMBH
Germany
Tool Management, Process Specific INFICON Sensor Integration and Analysis Systems provide process verification and control, including run-to-run control of key process parameters for process optimization and immediate and automatic feedback to the process equipment or a process engineer on any faults detected and their probable cause. FabGuard Sensor Integration and Analysis System takes data from in situ sensors, integrates that data with data from the process equipment itself, and condenses and analyzes it to provide the process engineer with actionable information. Alternatively, the engineer can choose to have FabGuard automatically send control commands directly to the process equipment. Powerful Data Management for Enhanced Productivity Make your fab's data work for you. The FabGuard Sensor Integration and Analysis System enhances tool productivity, by providing process control, and reducing losses from process drift, contamination, tool malfunction, or unnecessary test...
INFICON GMBH
Germany
Real-time Endpoint Detection and Leak Detection The INFICON Quantus LP100 Gas Analyzer provides real-time leak detection and endpoint detection for your critical process environments. Many processes are sensitive to leaks or require endpoint detection. The Quantus LP100 is a gas analyzer that is designed to react to small changes in sensitive process environments in real-time so that scrap is minimized and yields are improved.
INFICON GMBH
Germany
Some variants of the QMG 700 will be discontinued Jan 31, 2018 Exceeding Detection Limits with Superior Stability and Refined Resolution Rapid advancements in semiconductor manufacturing technology rely on swift and dependable gas analysis solutions. In the fab or in the lab, select the INFICON QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation. The QMG 700 provides unparalleled performance and adaptability in a modular design. Enhance your competitive edge with the QMG 700, and achieve a superior level of measurement capability. Select from a wide range of ion source, mass filter, and RF power supply options, to tailor your QMG 700 to specific applications. The QMG 700 boasts more than nine decades of dynamic range and ppb detection limits, making it the ideal instrument for ultra high vacuum measurements. QMG 700 provides unit resolution across its entire mass range, and even higher resolution for...