Residual Gas Analyzers (RGA) and Mass Spectrometers

QMA 400
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Description

Some variants of the QMG 700 will be discontinued Jan 31, 2018 Exceeding Detection Limits with Superior Stability and Refined Resolution Rapid advancements in semiconductor manufacturing technology rely on swift and dependable gas analysis solutions. In the fab or in the lab, select the INFICON QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation. The QMG 700 provides unparalleled performance and adaptability in a modular design. Enhance your competitive edge with the QMG 700, and achieve a superior level of measurement capability. Select from a wide range of ion source, mass filter, and RF power supply options, to tailor your QMG 700 to specific applications. The QMG 700 boasts more than nine decades of dynamic range and ppb detection limits, making it the ideal instrument for ultra high vacuum measurements. QMG 700 provides unit resolution across its entire mass range, and even higher resolution for...

Product characteristics

Mass Range
1-2048 amu (1)
Sensor Length
441.5 mm
Rod Diameter
8 mm
Rod Material
Molybdenum
Flange
DN 63 CF-F
Detector Type
Faraday/SEV 217
Max. Operating Pressure (FC)
1 E-4 mbar
Max. Operating Pressure (EM)
1 E-5 mbar
Sensitivity
5 E-4 A/mbar
Minimum Detectable Partial Pressure
1 E-15 mbar
Resolution (adjustable)
0.3 - 7 amu
Partial Pressure Ratio
< 0.5 ppb
Max. Operating Temp. Sensor
150 °C
Max. Bakeout Temp.
400 °C
Max. Operating Temp. Electronics
40 °C
Measurement Speed
0.125 ms - 60 s/amu
Power Supply
100 - 240 VAC

Domain icon Manufacturer/ Producer

50968 Köln - Germany

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