Thin Film Deposition

SMALL IN SIZE AND PRICE, BIG IN PERFORMANCE STM-2 combines the simplicity of USB connectivity with the accuracy of a precision measurement engine, all in a compact, inexpensive package. The size and simplicity of STM-2 help make setup and operation easy and efficient. SUPERIOR PERFORMANCE STM-2 is the most accurate USB powered thin film monitor in the industry. Ten measurements are taken per second while achieving a resolution of 0.037 Å per measurement (density of 1). EASY AND FLEXIBLE INSTALLATION STM-2 comes with everything you need to connect your QCM sensor/feedthrough to a Windows® PC. Simply connect the included BNC cable from the feedthrough to STM-2, then connect the STM-2 to your PC using a standard mini USB cable (included). No external oscillator or power supply is required. STM-2 features an internal oscillator that allows for simple and cost effective installation when STM-2 is located within 1 m (40 in.) of the quartz crystal. A standard INFICON® oscillator...

SIMPLE OPERATION FOR MANY APPLICATIONS STM-2XM is a two channel rate/thickness monitor that combines high accuracy with flexible programming and easy operation at an affordable price. STM-2XM is equipped with five operation modes to accommodate processes from simple to complex. For example, use simple mode to monitor just one single sensor for the simplest process or use alloy mode for codeposition monitoring. Independent mode allows STM-2XM to function as two completely separate monitors. Two sensor inputs allow for the use of two single or one dual quartz crystal sensor. 10 measurements are taken per second while achieving a resolution of 0.037 Å per measurement (density of 1). FEATURE PACKED STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analog outputs allowing for a level of integration usually reserved for more expensive instruments. Programmable features include shutter delay, time/power monitoring, and rate sampling. Use...

The SQM-160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analog rate and thickness signals. Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user selectable. In addition, Frequency or Mass displays can be selected. Four relay outputs allow the SQM-160 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings. Standard: RS-232; Optional: USB or Ethernet Standard: RS-232; Optional: USB or Ethernet Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD Class 1...

LOW-COST DEPOSITION CONTROL ON A PCI EXPRESS CARD The IQM-233 PCI Express card turns your PC into a thin film deposition controller. This INFICON designed and manufactured product is the ideal choice for system OEMs, or anyone wishing to incorporate a thin film deposition controller into an existing PC or PLC controlled system. Installation is simple—all you need is an unoccupied PCI Express slot. IQM-233 is available to fit in standard or small form factor PC towers. UNPARALLELED FEATURES The IQM-233 features three QCM sensor inputs and three source outputs on each card. Up to two IQM-233 cards can be installed in a single PC (requires optional IQS-233 software), giving you a maximum of six sensor inputs and six source outputs. Only INFICON offers this level of flexibility in a fully integrated PC controlled QCM controller. IQM-233 is compatible with INFICON oscillator IPN 782-900-010, so replacing an SQM-242 card does not require a new oscillator. It is also compatible with...