ZYGO CORPORATION

Optical Profiler Objectives Profiler Objectives on Motorized TurretKey to keeping an optical profiler investment cost effective and relevant for the long haul is making sure that it will be adaptable as metrology needs evolve. Objectives are at the heart of ZYGO’s CSI Profilers, providing flexibility in field of view, lateral resolution, and slope acceptance. For that reason, ZYGO has worked to have one of the widest ranges of interferometric objectives available – from 1X to 100X, which can be added over time. The objective variety delivers an industry leading field of view range extending from 0.4mm up to more than 17mm. Beyond just field of view, though, ZYGO objectives are designed to be parfocal so that they can be combined in a variety of ways to deliver maximum application flexibility. Several application specific configurations and accessories are available including: ... Click to read more

ZYGO's Mx™ software powers complete system control & data analysis, including interactive 3D maps, quantitative topography data, intuitive navigation, & built-in SPC with statistics, control charting, and pass/fail limits. World Class Analysis & Control Software Mx is the successor to the highly trusted MetroPro measurement and analysis suite. Mx continues the legacy of trustworthy metrology, powerful customization, and production friendly automation. Its workflow-based design guides users through the metrology experience from setup through analysis and reporting. Interactive plots show full-area data in 2D or 3D, along with profile slices, material ratio, slope analysis, and PSD views. Production quality analysis is made simple with built-in SPC, pass/fail indication, data reporting and run charts. Click to read more

Metrology workhorse of the optics shop Verifire Laser Interferometer System The Verifire™ interferometer system provides fast and reliable measurements of surface form error, and transmitted wavefront of optical components, systems and assemblies. A true laser Fizeau design, the Verifire™ system expands upon ZYGO's unmatched experience in surface form metrology. The ZYGO-manufactured HeNe laser source combined with ZYGO's patented acquisition algorithms and full-featured Mx™ metrology software, enables high-precision metrology with easy to use analysis capabilities Confident Metrology on the Shop Floor Technology for optical metrology has advanced significantly in recent years. In the past, environmental effects needed to be carefully controlled to achieve reliable measurements. Today, ZYGO offers technologies that enable reliable measurements in harsh environments where vibration and air turbulence can make traditional optical metrology difficult or impossible.

Confident Metrology for a Dynamic World DynaFiz Dynamic Metrology Interferometer Purpose built for reliable interferometry in vibration-prone environments; versatile and flexible enough to address a wide range of application needs from high-end telescope testing to live phase feedback for active alignment of optical systems. The light efficient optical design of the DynaFiz®, combined with the ZYGO high power HeNe laser source, enables operation at high camera shutter speeds that "freeze" vibration. This dynamic capability provides reliable metrology in environments that are too violent for traditional temporal phase shifting techniques.

ZYGO's Verifire HD and Verifire HDX are designed and built for mid-spatial frequency content characterization of extreme performance optical components and systems. QPSI, and the ZYGO-made long-life stabilized laser are included standard, along with best-in-class imaging and resolution for high instrument transfer function (ITF), superior characterization of mid-spatial frequency content and high-slope surface deviations. Key Features 5.3 megapixel (Verifire HD) and 11.6 megapixel (Verifire HDX) camera resolution, supported by rigorous optical designs and validated by ZYGO’s proprietary ITF qualification techniques. QPSI™ acquisition technology, available only from ZYGO, enables reliable measurements in vibration-prone environments ZYGO-manufactured HeNe laser source Longer lifetime than commercially available lasers, 60k hour lifetime backed by a 3-year warranty! Higher power for improved vibration performance and low-light applications ... Click to read more

Simultaneous Multi-Surface Test Interferometer Verifire™ MST Laser InterferometerSimplify the complex – multiple surfaces create complex fringe patterns, the Verifire™ MST uses patented wavelength-shifting technology to acquire phase data from multiple surfaces simultaneously. Report key metrics from individual surfaces of parallel windows, transmitted wavefront, as well as precise surface-to-surface information like total thickness variation (TTV), wedge and even material inhomogeneity. The Verifire™ MST addresses demanding applications like mobile device display glass, data storage disks and semiconductor wafers with precise surface and thickness variation metrology for test parts as thin as 0.5 mm.

Performance, flexibility, and precise asphere metrology Aspheric optics enable significant benefits in the design and implementation of imaging, sensing and laser systems used in industries from defense & aerospace, semiconductor exposure and inspection systems and medical imaging systems. Production of aspheres that support these applications is dependent on precision metrology. After all, when it comes to aspheric optics, you can’t make what you can’t measure. The Verifire Asphere+ (VFA+) leverages the benefits of Fizeau interferometry to provide a unique combination of precise, high resolution, fast, and full aperture metrology for axisymmetric aspheres. The VFA+ provides a flexible metrology platform to measure a range of axisymmetric aspheres with only a change of the transmission sphere. The VFA+ is equipped with an optional secondary stage which supports a computer generated hologram (CGH) extending the asphere shape capability to nonsymmetri

At-wavelength metrology for demanding IR imaging applications Verifire Interferometer, Infrared WavelenghtsOptical imaging applications are broad and varied. Testing at a system's design wavelength is critical for development, final alignment and qualification. Night vision, IR, and thermal imaging systems for aerospace and defence, lithography subsystems, remote sensing telescopes, and exotic material qualification represent broadly-varying wavelength requirements, and all benefit from testing at design wavelength with an infrared interferometer system.

Large-Aperture Downward-Looking Interferometer Large aperture, small footprint – The Verifire XL is a turnkey interferometer workstation for easy testing of plano optics up to 300 mm diameter. This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing. The compact footprint, with built-in vibration isolation and controller monitor stand, requires minimal production floor space.

Interferometer workstations for efficient production optics manufacturing Verifire™ MST Laser Interferometer WorkstationZYGO’s Verifire VTS is a purpose-built spherical optics interferometer workstation. The vertical upward-looking workstation enables fast pick-and-place measurements by working with gravity to hold test parts in place. The integrated passive vibration isolation system and granite base ensure a rock-solid metrology platform designed for peak performance even in production environments. A motorized Z-stage with 1 m of travel enables quick automated placement of the test part, as well as point-to-point radius of curvature. VTS. The VTS is compatible with a range of interferometer mainframes, select the performance level that suits your production or development needs. The compact footprint is available with or without a safety enclosure with light-curtain motion interlock that meets CE machine safety requirements ... Click to read more