Using IKO CLube Linear Way L for the linear motion rolling guide and IKO Crossed Roller Bearings in the rotation guiding parts, while adopting direct drive method in the drive section, IKO Alignment Stage SA···DE is a compact, lowprofile alignment stage which achieves XYθ motion.Alignment Stage SA···DE achieves highly accurate positioning without backlash by combining a highresolution linear scale and full closed loop control. An ideal positioning mechanism for alignment processing using image processing, such as in semiconductor/liquid crystal manufacturing equipment, or for measuring instruments or testing and inspection equipment requiring clean environments.
Netherlands
The IKO Alignment Module AM is a positioning module developed for alignment stages by combining high rigidity Crossed Roller Bearings and Linear Way E with Precision Positioning Table TU. Alignment stages can be configured without adjusting the height of each alignment module, since the height tolerance is managed with high accuracy of ±10 μm.
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Alignment Table AT is a rotary positioning mechanism capable of precise angle correction, in which a high rigidity steel table and bed are used and IKO Crossed Roller Bearings are incorporated in the bearings supporting the table. Alignment Table AT uses the ball screw drive to convert linear motion into circular motion in a fixed angle range and positions the table in the rotational direction. An IKO Linear Way L is used for the linear motion rolling guide of the ball screw drive mechanism, combined with a precision ball screw to achieve high precision positioning. Placing Alignment Table AT on the slide table of the IKO Precision Positioning Table enables the configuration of a low height XYθ multiaxis positioning mechanism. This enables the table to be used as an alignment table for precision measuring equipment, inspection equipment and assemblers.
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Precision Positioning Table LB is a highspeed movementenabled, long stroke positioning table that adopts a highly durable and hightensile timing belt containing steel cord incorporated into the feeding mechanism of the slide table, and uses a high torque 5phase stepper motor as the driving motor. The slide table and bed are made of lightweight highstrength aluminum alloy. Two sets of IKO Linear Way are incorporated into the linear motion rolling guide in parallel, realizing stable and high running performance. Precision Positioning Table LB is ideal as a positioning mechanism, for assemblers, conveying machines or pallet changers that work at high speed.
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The IKO Linear Motor Table LT is a compact and highprecision positioning table made of aluminum alloy, with an optical linear encoder built in and an AC linear servomotor incorporated between moving table and bed. Three series (Compact Series LT···CE, Long Stroke Series LT···LD and High Thrust Series LT···H) are available and can be selected according to the application. The lightweight moving table and large thrust force of Linear Motor Table LT enables operation with high acceleration/deceleration and high response. Further, the advanced servo technology achieves high static stability and speed stability. Linear Motor Table LT is ideal for applications such as semiconductors and liquid crystal related equipment, measuring instruments, assemblers and conveying machines that require highspeed work.
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