EMIOS TECHNOLOGIES GMBH

The Vacuum Chamber VC P400x400 is made of a unique, flexible chamber system based on extruded aluminium profiles. The three meter long profiles are cut to the desired length and equipped with a bolted rear wall and a door. Slits are provided in the side walls of the profile for easy insertion of the product carriers. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Excellent thermal conduction ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: up to 3000 mm (standard: 625 mm) Width: 400 mm Height: 400 mm Front panel (optional): 10 U (1 U = 44.45 mm) Connections 1 x KF 16 6 x KF 40 Additional flanges possible in any position

Vacuum degassing / outgassing With the aid of vacuum outgassing, unpleasant tastes or odors can be degassed and thus rendered tasteless. Altitude simulation For aircraft transport, it is essential to perform tests and simulations at a pressure <800 mbar, since in cargo holds, pressure equalization takes place, but cannot compensate for all fluctuations. Vacuum storage systems The safest way to store highly sensitive components is under vacuum. Under the vacuum environment, your components are protected from all external influences. Control and process control Our specially developed control program offers not only the possibility to monitor, but also to program and store various process sequences. High and ultra-high vacuum From the pressure range of rough vacuum to fine vacuum and ultra-high vacuum, we are able to meet your process requirements with our systems.

The VC M1200² is based on our new modular chamber system. The system consists of individual, fully milled aluminum modules with a depth of 500mm. Thus the length of the chamber can be variably set in 500mm steps. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: 1000 mm (modular in 500 mm steps) Width: 1200 mm Height: 1200 mm Connections 2 x KF 16 6 x KF 40 1 x ISO K 63 1 x ISO K 160 Additional flanges possible in any position

The VC M1000² is based on our new modular chamber system. The system consists of individual, fully milled aluminum modules with a depth of 500mm. Thus the length of the chamber can be variably set in 500mm steps. ✓ Flexible length of max. 3 meters ✓ Very fast delivery because only door and back wall must be supplemented ✓ Low-cost ✓ Low-weight ✓ Low desorption of the aluminium, therefore also suitable for high vacuum ✓ Highly clean processes possible, e.g. in the semiconductor field ✓ Easy operation ✓ Easy attachment to the existing division bars Vacuum chamber specifications Internal dimensions Length: 1000 mm (modular in 500 mm steps) Width: 1000 mm Height: 1000 mm Connections 2 x KF 16 6 x KF 40 1 x ISO K 63 1 x ISO K 160 Additional flanges possible in any position