INFICON AG

The ADC100 system connects to a DC power generator in order to detect plasma arcing in real time. This provides the ability to interrupt a wafer process and notify engineers of potential hardware or product damage.

Fabwide, Process Specific FabGuard FDC combines on-line Fault Detection and Classification (FDC) capabilities with powerful tools for fab engineers to readily analyze virtually any aspect of process and equipment behavior. No other system provides greater capability to guard against wafer loss, reduce unscheduled tool downtime and improve yield. Regardless of wafer size or product geometry, timely information is key to fab productivity and competitiveness. The increasing pressure to reduce costs makes it critical to maximize fab productivity, reduce the number of scrapped wafers and maximize equipment utilization. FabGuard meets the challenges of today’s semiconductor manufacturing by combining the collective experience of statisticians and engineers tasked with maintaining cutting edge fab productivity. FabGuard FDC is built on the principle that process and equipment knowledge is crucial to smooth fab operations. Redefining FDC - FabGuard Detection and...

Advanced Modeling, Data Analysis and Visualization Capabilities Made Simple Increase Yield by Expanding Process Data Analysis FabGuard Analysis Server (AS) makes it possible to analyze every variable in the factory to apply advanced multivariate SPC and modeling. Detecting faults caused by the interactions of multiple process variables is accomplished with the many advanced multivariate analysis tools in FabGuard AS. FabGuard Analysis Server can easily expand the capabilities of existing FDC systems by enabling engineers to detect faults not typically monitored by univariate SPC. Many faults are caused by the complex interaction of multiple equipment and process parameters. FabGuard AS provides multiple advanced techniques to perform Fault Detection, Fault Classification and Metrology Prediction. These tools highlight excursions that simple univariate FDC systems will never detect. FabGuard AS provides engineers a powerful toolbox to uncover hard to detect faults.

INTEGRATED MANAGEMENT OF TOOL RECIPES Increasing complexity of manufacturing and requirements for better process control requires better integration and management. Seamless integration of FDC and Factory Automation and Equipment Control is critical for providing accurate excursion prevention and tight control over the operation of factory equipment. FabGuard™ Recipe Management System helps Semiconductor, Display and Solar manufacturers meet these challenges by providing central archival and management of process equipment recipes. As an add-on to the FabGuard Fault Detection and Classification System, FabGuard FG-RMS expands existing FabGuard systems to include the capabilities required to manage tool process recipes across the factory. CENTRAL MANAGEMENT INCREASES PRODUCTIVITY FabGuard provides central management of tool process recipes using the familiar and robust FabGuard infrastructure. Engineers can view, edit, deploy and manage process recipes from their desktop or...

Integrated Out of Control Action Plans Increasing complexity of manufacturing and the need to correct issues in real time requires that everyone has access to expert knowledge that can be used to minimize downtime and correct issues. FabGuard eOCAP provides a framework for capturing complex knowledge assets and delivering them intuitively and interactively to users at the moment they need them, via a web browser. FabGuard eOCAP enables both expert and non-expert users to collaborate in capturing, delivering, maintaining, and improving this vital content. Knowledge Management System FabGuard eOCAP helps organizations move beyond traditional knowledge repositories, interactively helping non-experts find and apply the right knowledge through relevant and properly sequenced multi-step processes. Additionally, FabGuard eOCAP can learn and constantly react to the changing relevance of different articles. The system helps factories to capture and automate the logical flow of...

Timely information is essential for increasing fab productivity and remaining competitive in the market place. The pressure to enhance profitability makes it critical that a factory is productive and flexible, while increasing yield and throughput. FabGuard APC saves both time and money in factory operations by executing run-by-run (RbR) control strategies that drive process results to achieve target regardless of day-to-day equipment or process drift. APC systems collect product measurements and recipe set points which are used to calculate new recipe set points that optimize wafer processing. The use of an APC System maximizes overall product yields and increases profit by making sure that each wafer performs as close to end of line metrics as possible. Benefits FabGuard APC increases yields, reduces costs and enhances manufacturing by providing optimal process set points to compensate for equipment and environmental variations. Strategy and Flow FabGuard APC provides you with...

Tool Management, Process Specific INFICON Sensor Integration and Analysis Systems provide process verification and control, including run-to-run control of key process parameters for process optimization and immediate and automatic feedback to the process equipment or a process engineer on any faults detected and their probable cause. FabGuard Sensor Integration and Analysis System takes data from in situ sensors, integrates that data with data from the process equipment itself, and condenses and analyzes it to provide the process engineer with actionable information. Alternatively, the engineer can choose to have FabGuard automatically send control commands directly to the process equipment. Powerful Data Management for Enhanced Productivity Make your fab's data work for you. The FabGuard Sensor Integration and Analysis System enhances tool productivity, by providing process control, and reducing losses from process drift, contamination, tool malfunction, or unnecessary test...

Process Characterization Software For The Transpector Gas Analysis System With one-click access to the two most popular RGA functions: monitor and leak check modes, FabGuard Explorer provides you with easy to interpret data showing the most frequently monitored gases (hydrogen, water vapor, nitrogen, oxygen, argon, etc.) in a convenient trend display. FabGuard Explorer is Windows® 8 ready, providing comprehensive RGA software with no concerns about operating system compatibility. The single-sensor version of FabGuard Explorer is a cost-effective solution to operating one Transpector ® RGA. With the software’s multi-sensor version, you can control multiple, different types of Transpector RGAs from a single computer. FabGuard Explorer allows for control of both Transpector MPH and Transpector 2 RGAs from the same software. For connecting multiple Transpector MPH sensors, INFICON offers routers and network switches, while the TCA485 Transpector Communications Adapter is used for...

The NEW INFICON Vacuum Gauge Controller VGC083 is designed for use with passive gauge heads BAG05x and PGE050 in a fixed combination of two PGE050 gauges and one BAG05x gauge. The VGC083 controlls and monitors vacuum pressure from ATM down to 2.7×10 -11mbar using the BAG and PGE gauges. Six (6) single-pole relays assignable to any of the gauge heads along with RS232 and RS485 interfaces aid in system integration. The rugged industrial design of the VGC083 in combination with the passive gauge heads provide a reliable and economical system for vacuum applications requiring a wide vacuum measurement range. Simple operation with special OLED display for parameter, sensor or general settings with softkeys Very bright and clear LED display for long distance vacuum pressure read-out Three analog outputs, user assignable to any of the gauges Degas electron bombardment or I 2R resistive heating for gauge conditioning depending on gauge head type Remote digital I/O sensor & emission...

The INFICON Bayard-Alpert passive vacuum gauge heads BAG050, BAG051, BAG052 and BAG053 are designed for use with the INFICON Vacuum Gauge Controller VGC083A & VGC083B. Yttria coated iridium filaments are offered for general vacuum applications in air and inert gases such as N2 and argon. Select tungsten filaments for gases that are not compatible with yttria coated iridium filaments. BAG05x gauges may also be operated with compatible vacuum gauge controllers from other manufacturers. The INFICON passive Bayard-Alpert ionization vacuum gauges (BAG05x) are offered in three different configurations: BAG050 is a EB-degas UHV nude ionization vacuum gauge capable of pressure measurement as low as 2×10 -11 Torr. BAG051 is a resistive degas (I 2R) nude ionization vacuum gauge capable of pressure measurement as low as 4×10 -10 Torr. BAG052 and BAG053 are resistive degas (I 2R) glass enclosed ionization vacuum gauges capable of pressure measurement as low as 4×10 -10 Torr. Reliable and...