INFICON GMBH

Maximum stability in demanding applications The standard AT-cut, 1 in. (25.4 mm) diameter crystal, pioneered by INFICON, is used primarily in research applications with the INFICON RQCM (Research Quartz Crystal Microbalance). These research crystals are designed for use with INFICON rugged, easy to use crystal holders and are used for in-situ monitoring of deposited films or liquids. Geometry AT-cut quartz has superior mechanical and piezoelectric properties. The 1 in. (25.4 mm) diameter allows optimal distance between the active area of the crystal and the mounting o-ring. This improves the overall stability of the crystal by reducing the frequency changes due to mounting stress. Finish INFICON 1 in. (25.4 mm) research crystals are available with either an unpolished or polished finish. Polished crystals allow for a good correlation between theory and measurement during liquid immersion experiments. Electrode Material INFICON 1 in. (25.4 mm) research crystals are available...

MAKING EXCELLENCE REPEATABLE Feature-Rich IC6 Provides the Best Measurement Precision Possible The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process. The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable. 1 Å for 0 to 9.999 kÅ 10 Å for 10.00 to 99.99 kÅ 100 Å for 100.0 to 999.9 kÅ 1 kÅ for 1000 to 9999 kÅ 0.001 for 0 to 9.999 Å/s if rate filter time setting is 10 seconds or greater 0.01 for 0 to 99.99 Å/s 0.1 for 100 to 999.9 Å/s 100 – 230 V (ac) +/- 15% 50 / 60 Hz +/- 3 Hz (1) Tooling/density = 100/1, fundamental frequency = 6 MHz (2)...

The Best Measurement Precision Possible for OLED Applications Cygnus 2 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your OLED process. Cygnus 2 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of .00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of Cygnus 2, allowing you to make excellence repeatable. 1 Å for 0 to 9.999 kÅ 10 Å for 10.00 to 99.99 kÅ 100 Å for 100.0 to 999.9 kÅ 1 kÅ for 1000 to 9999 kÅ 0.001 for 0 to 9.999 Å/s 0.01 for 0 to 99.99 Å/s 0.1 for 100 to 999.9 Å/s 100 – 230 V (ac) +/- 15% 50 / 60 Hz +/- 3 Hz (1) Tooling/density = 100/1, fundamental frequency = 6 MHz (2) Varies according to process; figures reflect typical accuracy (3) Maximum configuration of...

Advanced, Affordable Rate Control for Single or Multiple Layers Now get everything you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation, and extremely high reliability to ensure productivity. INFICON, the global leader in thin film deposition control, now offers an instrument with a remarkably low cost of ownership for unprecedented value. Whether your control needs reflect production or research and development use, you will find a precise match in the INFICON XTC/3. Worldwide INFICON Support No matter where you are, you get fast answers, attentive service, and maximum uptime. With offices around the world, INFICON is the only manufacturer of thin film deposition...

Highly Accurate Sequential or Codeposition Control With advanced electronics, an improved display, and a very affordable price, the INFICON SQC-310 Series gives you features not found on competitors' thin film controllers. And you can choose the ideal model for your application: sequential deposition (SQC-310) or codeposition (SQC-310C).

LOW-COST DEPOSITION CONTROL ON A PCI EXPRESS CARD The IQM-233 PCI Express card turns your PC into a thin film deposition controller. This INFICON designed and manufactured product is the ideal choice for system OEMs, or anyone wishing to incorporate a thin film deposition controller into an existing PC or PLC controlled system. Installation is simple—all you need is an unoccupied PCI Express slot. IQM-233 is available to fit in standard or small form factor PC towers. UNPARALLELED FEATURES The IQM-233 features three QCM sensor inputs and three source outputs on each card. Up to two IQM-233 cards can be installed in a single PC (requires optional IQS-233 software), giving you a maximum of six sensor inputs and six source outputs. Only INFICON offers this level of flexibility in a fully integrated PC controlled QCM controller. IQM-233 is compatible with INFICON oscillator IPN 782-900-010, so replacing an SQM-242 card does not require a new oscillator. It is also compatible with...

The SQM-160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analog rate and thickness signals. Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user selectable. In addition, Frequency or Mass displays can be selected. Four relay outputs allow the SQM-160 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings. Standard: RS-232; Optional: USB or Ethernet Standard: RS-232; Optional: USB or Ethernet Class 1 equipment, 73/72/EEC LVD, 89/336/EEC ECD Class 1...

SIMPLE OPERATION FOR MANY APPLICATIONS STM-2XM is a two channel rate/thickness monitor that combines high accuracy with flexible programming and easy operation at an affordable price. STM-2XM is equipped with five operation modes to accommodate processes from simple to complex. For example, use simple mode to monitor just one single sensor for the simplest process or use alloy mode for codeposition monitoring. Independent mode allows STM-2XM to function as two completely separate monitors. Two sensor inputs allow for the use of two single or one dual quartz crystal sensor. 10 measurements are taken per second while achieving a resolution of 0.037 Å per measurement (density of 1). FEATURE PACKED STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analog outputs allowing for a level of integration usually reserved for more expensive instruments. Programmable features include shutter delay, time/power monitoring, and rate sampling. Use...

SMALL IN SIZE AND PRICE, BIG IN PERFORMANCE STM-2 combines the simplicity of USB connectivity with the accuracy of a precision measurement engine, all in a compact, inexpensive package. The size and simplicity of STM-2 help make setup and operation easy and efficient. SUPERIOR PERFORMANCE STM-2 is the most accurate USB powered thin film monitor in the industry. Ten measurements are taken per second while achieving a resolution of 0.037 Å per measurement (density of 1). EASY AND FLEXIBLE INSTALLATION STM-2 comes with everything you need to connect your QCM sensor/feedthrough to a Windows® PC. Simply connect the included BNC cable from the feedthrough to STM-2, then connect the STM-2 to your PC using a standard mini USB cable (included). No external oscillator or power supply is required. STM-2 features an internal oscillator that allows for simple and cost effective installation when STM-2 is located within 1 m (40 in.) of the quartz crystal. A standard INFICON® oscillator...

FAST, FIELD-READY PROCESS MONITORING SYSTEM Performance, Reliability, and Versatility INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch. Transpector CPM 3 provides proven return on investment to our partners through: 1 Ion source pressure reading @ low emission using total pressure lens 2 Total pressure accuracy @ low emission 3 Maximum ion source operating pressure @ low emission 4 2x10 -4 Torr in the ion source will produce about 1x10 -5 Torr in the quadrupole region 5 MDPP at the ion source with EM on and 1s dwell time 6 Mass 40 contribution onto 41 AMU 7 Zero blast...