Ims5420-th Wafer Thickness Measuring System

Laser distance sensors are designed for non-contact distance measurements: laser gauges for measuring ranges up to 10m, laser distance sensors for up to 270m. These sensors are used for positioning and type classification in machine building and handling equipment.

The K and MK draw-wire sensors are specially designed for series applications with large numbers of pieces. The user benefits from an excellent price/performance ratio and compact sensor dimensions, therefore gaining new potential in design and cost optimization. As well as analog versions with potentiometer, current or voltage output, digital versions with incremental or absolute encoders are available.

The innovative white light interferometers from Micro-Epsilon set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution offering a comparatively large measuring range and offset distance. The interferometers are available in 3 series: the IMS5400-DS for high-precision industrial distance measurements, the IMS5400-TH for accurate thickness measurements and the vacuum-suitable IMS5600-DS for distance measurements with picometer resolution.

P-series draw-wire sensors are designed for industrial measurement tasks. A compact and robust aluminum housing protects the sensor from mechanical influences. As well as analog versions with potentiometer, current or voltage output, digital versions with incremental or absolute encoders are available, providing measuring ranges up to 50 m.