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Using IKO CLube Linear Way L for the linear motion rolling guide and IKO Crossed Roller Bearings in the rotation guiding parts, while adopting direct drive method in the drive section, IKO Alignment Stage SA···DE is a compact, lowprofile alignment stage which achieves XYθ motion.Alignment Stage SA···DE achieves highly accurate positioning without backlash by combining a highresolution linear scale and full closed loop control. An ideal positioning mechanism for alignment processing using image processing, such as in semiconductor/liquid crystal manufacturing equipment, or for measuring instruments or testing and inspection equipment requiring clean environments.

The IKO Linear Motor Table LT is a compact and highprecision positioning table made of aluminum alloy, with an optical linear encoder built in and an AC linear servomotor incorporated between moving table and bed. Three series (Compact Series LT···CE, Long Stroke Series LT···LD and High Thrust Series LT···H) are available and can be selected according to the application. The lightweight moving table and large thrust force of Linear Motor Table LT enables operation with high acceleration/deceleration and high response. Further, the advanced servo technology achieves high static stability and speed stability. Linear Motor Table LT is ideal for applications such as semiconductors and liquid crystal related equipment, measuring instruments, assemblers and conveying machines that require highspeed work.

IKO Nano Linear NT is a moving magnet type linear motor table with a magnet and optical linear encoder scale in the steel moving table part, and a stator coil and optical linear encoder head in the steel bed. For the table guiding parts, an IKO Linear Way, wellestablished in the area of miniature linear motion rolling guides, is used in combination with a linear motor and highresolution linear encoder to realize highly accurate positioning. Thanks to the adoption of highperformance neodymium magnet, large thrust force can be acquired and therefore highspeed and highly responsive positioning is possible, despite its very small body. In addition, high cleanliness is realized as the mechanical contact part is only the linear motion rolling guide thanks to adoption of a landmark driving method without cables. Nano Linear NT is an optimal compact positioning mechanism for semiconductor and LCD manufacturing machines, as well as testing and inspection equipment

IKO Nano Linear is a moving magnet type linear motor table with a magnet and optical linear encoder scale in the steel moving table part, and a stator coil and an optical linear encoder head in the steel bed. For the table guiding parts, an IKO Crossed Roller Way, wellestablished in the area of miniature linear motion rolling guides, is used in combination with a linear motor and highresolution linear encoder to realize highly accurate positioning. Thanks to adoption of a highperformance neodymium magnet, large thrust force can be acquired and therefore highspeed and highly responsive positioning is possible, despite the very small body. In addition, high cleanliness is realized as the mechanical contact part is only the linear motion rolling guide thanks to adoption of a landmark driving method without cables. Nano Linear is an optimal compact positioning mechanism for semiconductor and LCD manufacturing machines, as well as testing and inspection equipment and electronic

IKO Nano Linear NT is a compact linear motor table with excellent functionalities, such as a magnet and optical linear encoder scale in the steel moving table part, and a stator coil and an optical linear encoder head in the steel bed. For the table guiding parts, the adoption of CLube Linear Way ML, which realizes long term maintenance free use, helps reduce the maintenance work. Despite its very small body, the rotator exerts a maximum thrust of 36N by adopting a highperformance neodymium magnet, enabling highspeed, highly responsive positioning. Highcleanliness can be realized as the mechanical contact part is only Linear Way. Nano Linear NT is an optimal compact positioning mechanism for semiconductor and LCD manufacturing machines, as well as testing and inspection equipment and assemblers which require a clean environment.

IKO Precision Elevating Table TZ is an elevating table that performs precision positioning in the up and down directions by using the wedge mechanism.The wedge mechanism applied IKO Linear Way has achieved both high accuracy and high rigidity with a compact size.

The IKO Alignment Module AM is a positioning module developed for alignment stages by combining high rigidity Crossed Roller Bearings and Linear Way E with Precision Positioning Table TU. Alignment stages can be configured without adjusting the height of each alignment module, since the height tolerance is managed with high accuracy of ±10 μm.

Alignment Table AT is a rotary positioning mechanism capable of precise angle correction, in which a high rigidity steel table and bed are used and IKO Crossed Roller Bearings are incorporated in the bearings supporting the table. Alignment Table AT uses the ball screw drive to convert linear motion into circular motion in a fixed angle range and positions the table in the rotational direction. An IKO Linear Way L is used for the linear motion rolling guide of the ball screw drive mechanism, combined with a precision ball screw to achieve high precision positioning. Placing Alignment Table AT on the slide table of the IKO Precision Positioning Table enables the configuration of a low height XYθ multiaxis positioning mechanism. This enables the table to be used as an alignment table for precision measuring equipment, inspection equipment and assemblers.

IKO Super Precision Positioning Table TX is a positioning table with extremely high accuracy which is created based on the high precision, high rigidity and well proven IKOPrecision Positioning Table LH by using cylindrical rollers for rolling elements and incorporating IKOLinear Roller Way Super X, which has bestinclass running performance as a linear motion rolling guide, with fullyclosed loop control. Optimal for highly accurate positioning where the existing rolling guides could not be used.

IKO Precision Positioning Table L is a lightweight, long stroke positioning table configured with the slide table and bed made from highstrength aluminum alloy. High accuracy and carrying mass are realized by incorporating two sets of IKO Linear Ways in parallel, and using a precision ball screw in the feeding mechanism. Maintenance work such as relubricating with grease can be reduced significantly by CLube. Various table sizes and stroke lengths are available, and dedicated XY brackets are also serialized, enabling systems such as orthogonal robots to be easily configured according to the application. Precision Positioning Table L is ideal as a highprecision positioning mechanism, for assemblers, processing machines, or measuring instruments.