Precision Positioning Table TSLB

Using IKO CLube Linear Way L for the linear motion rolling guide and IKO Crossed Roller Bearings in the rotation guiding parts, while adopting direct drive method in the drive section, IKO Alignment Stage SA···DE is a compact, lowprofile alignment stage which achieves XYθ motion.Alignment Stage SA···DE achieves highly accurate positioning without backlash by combining a highresolution linear scale and full closed loop control. An ideal positioning mechanism for alignment processing using image processing, such as in semiconductor/liquid crystal manufacturing equipment, or for measuring instruments or testing and inspection equipment requiring clean environments.

The IKO Linear Motor Table LT is a compact and highprecision positioning table made of aluminum alloy, with an optical linear encoder built in and an AC linear servomotor incorporated between moving table and bed. Three series (Compact Series LT···CE, Long Stroke Series LT···LD and High Thrust Series LT···H) are available and can be selected according to the application. The lightweight moving table and large thrust force of Linear Motor Table LT enables operation with high acceleration/deceleration and high response. Further, the advanced servo technology achieves high static stability and speed stability. Linear Motor Table LT is ideal for applications such as semiconductors and liquid crystal related equipment, measuring instruments, assemblers and conveying machines that require highspeed work.

IKO Nano Linear NT is a linear motor drive high thrust pick & place unit with compact integral X and Zaxes, using IKO CLube Linear Way ML in the table guiding parts. Thanks to the adoption of a system which drives the moving table with a link mechanism, it realizes both higher thrust of the linear motor and weight reduction of the moving parts and reduces tact time. By entering a positioning program, you may set flexible operation patterns and change strokes easily according to the workpiece. IKO Nano Linear NT is an optimal compact positioning mechanism for semiconductor and LCD manufacturing machines, as well as testing and inspection equipment and electronic parts assembling machines which require a clean environment.

IKO Nano Linear NT is a moving magnet type linear motor table with a magnet and optical linear encoder scale in the steel moving table part, and a stator coil and optical linear encoder head in the steel bed. For the table guiding parts, an IKO Linear Way, wellestablished in the area of miniature linear motion rolling guides, is used in combination with a linear motor and highresolution linear encoder to realize highly accurate positioning. Thanks to the adoption of highperformance neodymium magnet, large thrust force can be acquired and therefore highspeed and highly responsive positioning is possible, despite its very small body. In addition, high cleanliness is realized as the mechanical contact part is only the linear motion rolling guide thanks to adoption of a landmark driving method without cables. Nano Linear NT is an optimal compact positioning mechanism for semiconductor and LCD manufacturing machines, as well as testing and inspection equipment