Precision measurement technology - Import export

ZYGO nano-position sensors are widely used in closed-loop motion control systems like photolithography and semiconductor inspection tool stages, as well as for deformable optical systems. We have pioneered innovations in the displacement and position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs. Displacement Position Sensors ZYGO's ZMI™ systems use heterodyne interferometer technology to precisely measure relative changes in position. Absolute Position Sensors ZYGO'S ZPS™ system uses ultra-compact non-contact optical sensors to measure absolute position over a range of 1.2 mm on up to 64 synchronized channels.