ILOMOTO

IKO Cleanroom Precision Positioning Table TC···E is optimal for use in high cleanliness environments for semiconductor and LCD manufacturing machines. The unique highairtight structure seals the driving part and guiding parts of the slide table, and prevents dust generation around the table. IKO Cleanroom Precision Positioning Table TC···E achieves cleanliness class 3 by enhancing the airtightness inside the table.

IKO Precision Elevating Table TZ is an elevating table that performs precision positioning in the up and down directions by using the wedge mechanism.The wedge mechanism applied IKO Linear Way has achieved both high accuracy and high rigidity with a compact size.

The IKO Alignment Module AM is a positioning module developed for alignment stages by combining high rigidity Crossed Roller Bearings and Linear Way E with Precision Positioning Table TU. Alignment stages can be configured without adjusting the height of each alignment module, since the height tolerance is managed with high accuracy of ±10 μm.